Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With mechanical mask, shield or shutter for shielding workpiece
Inventor
active
Etching of nano-imprint templates using an etch reactor
Mask etch plasma reactor with cathode providing a uniform...
Mask etch plasma reactor with variable process gas distribution
Method and apparatus for photomask etching
Method and apparatus for photomask plasma etching
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