Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
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Apparatus for the stabilization of halogen-doped films through t
High deposition rate recipe for low dielectric constant films
Method for the stabilization of halogen-doped films through the
Sequencing of the recipe steps for the optimal low-k HDP-CVD pro
Sequencing of the recipe steps for the optimal...
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