4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Luc Van Autryve

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Absorber layer for DSA processing

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Etch process for forming contacts over titanium silicide

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Localizing cleaning plasma for semiconductor processing

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Patent

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Method of etching platinum using a silicon carbide mask

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1250565

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