Optics: measuring and testing
By light interference
For dimensional measurement
Inventor
active
Advanced process sensing and control using near infrared...
Determining endpoint in a substrate process
Determining endpoint in a substrate process
Interferometric endpoint determination in a substrate...
Method and apparatus for performing limited area spectral...
No associations
LandOfFree
Lei Lian does not yet have a rating. At this time, there are no reviews or comments for this inventor.
If you have personal experience with Lei Lian, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lei Lian will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-P-2231949