Optical waveguides – Optical waveguide sensor
Reexamination Certificate
2011-08-30
2011-08-30
Healy, Brian (Department: 2883)
Optical waveguides
Optical waveguide sensor
C385S115000, C216S060000, C156S345240, C356S451000, C065S385000, C065S469000
Reexamination Certificate
active
08009938
ABSTRACT:
Embodiments described herein provide a method and apparatus for obtaining process information in a substrate manufacturing process using plasma. In one embodiment, a chamber is provided having one or more optical metrology modules that are positioned such that optical energy from the plasma process is detected at substantially orthogonal angles. Metrics derived from detected optical energy may be used for endpoint determination, substrate temperature, and monitoring of critical dimensions on the substrate.
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Davis Matthew Fenton
Lian Lei
Applied Materials Inc.
Healy Brian
Patterson & Sheridan L.L.P.
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