4. Semiconductor device manufacturing: process
  5. Formation of electrically isolated lateral semiconductive...
  6. Isolation by pn junction only

Lance S. Robertson

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Divergent charged particle implantation for improved...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Implant optimization scheme

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Self-aligned
Reexamination Certificate

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Integrated circuit metal silicide method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for implanting dopants within a substrate by tilting...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Method for manufacturing a semiconductor device containing...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Plasma
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