4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With workpiece support

Lam Research AG

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Device and method for liquid treatment of wafer-shaped articles

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
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Device and method for wet treating disc-shaped articles

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
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Device and process for liquid treatment of wafer-shaped...

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
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Device for liquid treatment of wafer-shaped articles

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
Reexamination Certificate

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Method for drying a surface

Cleaning and liquid contact with solids – Processes – With treating fluid motion
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