Device and process for liquid treatment of wafer-shaped...

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...

Reexamination Certificate

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Details

C134S140000, C134S149000, C134S153000, C134S157000, C134S902000, C118S052000

Reexamination Certificate

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07726323

ABSTRACT:
A device for liquid treatment of a defined area of a wafer-shaped article, especially of a wafer, near the edge, in which the liquid is applied to a first surface, flows essentially radially to the outside to the peripheral-side edge of the wafer-shaped article and around this edge onto the second surface, the liquid wetting a defined section near the edge on the second surface and thereupon being removed from the wafer-shaped article.

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