Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere
Reexamination Certificate
2004-03-12
2010-11-23
Kornakov, Michael (Department: 1714)
Cleaning and liquid contact with solids
Processes
Including use of vacuum, suction, or inert atmosphere
C134S034000
Reexamination Certificate
active
07837803
ABSTRACT:
In a spin-chuck with plural collector levels, a separate exhaust controller is provided for each level. This permits selectively varying gas flow conditions among the collector levels, so that the ambient pressure at one level does not adversely affect device performance in an adjacent level.
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Coleman Ryan
Kornakov Michael
Lam Research AG
Young & Thompson
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