Device and method for wet treating disc-shaped articles

Cleaning and liquid contact with solids – Processes – Including use of vacuum – suction – or inert atmosphere

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C134S034000

Reexamination Certificate

active

07837803

ABSTRACT:
In a spin-chuck with plural collector levels, a separate exhaust controller is provided for each level. This permits selectively varying gas flow conditions among the collector levels, so that the ambient pressure at one level does not adversely affect device performance in an adjacent level.

REFERENCES:
patent: 4871471 (1989-10-01), Okuda
patent: 4903717 (1990-02-01), Sumnitsch
patent: 5273589 (1993-12-01), Griswold
patent: 5678116 (1997-10-01), Sugimoto
patent: 5718763 (1998-02-01), Tateyama et al.
patent: 6572701 (2003-06-01), Yamauchi et al.
patent: 6589338 (2003-07-01), Nakamori et al.
patent: 7074726 (2006-07-01), Sugimoto et al.
patent: 2003/0140949 (2003-07-01), Sugimoto et al.
patent: 2004/0050491 (2004-03-01), Miya
patent: 198 07 460 (1999-04-01), None
patent: 9-243419 (1997-09-01), None
patent: 11-87226 (1999-03-01), None
patent: 2001-44164 (2001-02-01), None
patent: 2002-246301 (2002-08-01), None
patent: 2002-305177 (2002-10-01), None
patent: 2002-329705 (2002-11-01), None
Patent Abstracts of Japan vol. 2000, No. 20, Jul. 10, 2001 & JP 2001 077082 A (Takita Corp), March 23, 2001.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Device and method for wet treating disc-shaped articles does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for wet treating disc-shaped articles, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for wet treating disc-shaped articles will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4179242

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.