Method for drying a surface

Details Method for drying a surface Method for drying a surface

2006-04-11

2011-10-18

Barr, Michael (Department: 1714)

Cleaning and liquid contact with solids

Processes

With treating fluid motion

C134S030000, C134S033000

Reexamination Certificate

active

08038804

ABSTRACT:
Method for drying a surface of a disc-shaped article includes covering the surface with a rinsing liquid, whereby a closed liquid layer is formed, and removing the rinsing liquid, wherein the rinsing liquid containing at least 50 wt. % water and at least 5 wt. % of a substance, wherein the substance lowers the surface energy of water, wherein the removing of the liquid is initiated by blowing gas onto the closed liquid layer, whereby the closed liquid layer is opened at on discrete area.

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patent: WO 02/054456 (2002-07-01), None
patent: WO 2005/015627 (2005-02-01), None

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