4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

LAM Research

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Method and apparatus for securely dechucking wafers

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method and system for clamping semiconductor wafers

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Method and system for locating and positioning circular workpiec

Geometrical instruments – Gauge – Center – point – distance between centers – or centerline location
Patent

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Variable high temperature chuck for high density plasma chemical

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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