Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent
1989-11-21
1993-11-16
Nguyen, Nam X.
Chemistry: electrical and wave energy
Apparatus
Coating, forming or etching by sputtering
156345, 20429835, 118503, C23F 102
Patent
active
052620298
ABSTRACT:
A wafer clamping mechanism includes a clamp ring having a central opening corresponding to the geometry of a conventional semiconductor wafer. An overhang located about the opening engages the corresponding semiconductor wafer when in place on an electrode of a plasma reactor. The clamp ring is resiliently mounted on a housing which holds a second electrode. The clamp ring is automatically engaged against the wafer as the spacing between the two electrodes is adjusted to a desired gap width. A raised annular barrier on the lower electrode circumscribes the wafer and engages a mating surface on the clamp ring in order to enhance alignment of the clamp.
REFERENCES:
patent: 4268374 (1981-05-01), Lepselter
patent: 4282924 (1981-08-01), Faretra
patent: 4340462 (1982-07-01), Koch
patent: 4367114 (1983-01-01), Steinberg et al.
patent: 4397724 (1983-08-01), Moran
patent: 4473455 (1984-09-01), Dean et al.
patent: 4508161 (1985-04-01), Holden
patent: 4512841 (1985-04-01), Cunningham, Jr. et al.
patent: 4522697 (1985-11-01), Dimock et al.
patent: 4603466 (1986-08-01), Morley
patent: 4657617 (1987-04-01), Johnson et al.
patent: 4671204 (1987-06-01), Ballou
Erskine David
Mundt Randall S.
Rafinejad Dariush
Wong Vernon W. H.
Yin Gerald Z.
LAM Research
Nguyen Nam X.
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