4. Heating
  5. Heating or heat retaining work chamber structure

Kyoung Bong Rouh

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Apparatus and method for partial ion implantation

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Apparatus and method for partial ion implantation using atom...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Apparatus and method for thermally treating semiconductor...

Heating – Heating or heat retaining work chamber structure
Reexamination Certificate

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Ion implantation apparatus and method for obtaining...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Ion implantation method

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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