4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Metal coating

Kunihiro Tada

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CVD-Ti film forming method

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Film forming and dry cleaning apparatus and method

Cleaning and liquid contact with solids – Processes – Hollow work – internal surface treatment
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Method for depositing a titanium film

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Patent

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Method for forming Ti film and TiN film, contact structure,...

Semiconductor device manufacturing: process – Gettering of substrate – By vapor phase surface reaction
Reexamination Certificate

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Method for forming TiSiN film, diffusion preventive film...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-692852

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