Film forming and dry cleaning apparatus and method

Details Film forming and dry cleaning apparatus and method Film forming and dry cleaning apparatus and method

1995-08-24

1998-01-20

Pyon, Harold Y.

Cleaning and liquid contact with solids

Processes

Hollow work, internal surface treatment

134 11, 134 21, 134 2212, 134 2219, 1566261, 1566431, B08B 310

Patent

active

057097577

ABSTRACT:
A film forming apparatus having a dry cleaning function comprises a process chamber for containing an object to be processed, a process gas supply system for introducing into the process chamber a process gas for forming one of a metal film or a metal compound film on the object, a heating device for depositing a component of the process gas on the object, thereby forming a film, a cleaning gas supply system for introducing into the process chamber a cleaning gas containing nitrogen trichloride or a fluoride such as chlorine trifluoride or nitrogen trifluoride for cleaning one of a metal or a metal compound adhering to an inner part of the process chamber due to the film formation, and an after-treatment gas supply system for introducing into the process chamber a cleaning after-treatment gas containing an alcohol.

REFERENCES:
patent: 4048240 (1977-09-01), Connelly
patent: 5298112 (1994-03-01), Hayasaka et al.
patent: 5486235 (1996-01-01), Ye et al.

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