4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Kunihiro Hosono

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Apparatus and method for identifying photomask pattern defects

Optics: measuring and testing – By configuration comparison – With comparison to master – desired shape – or reference voltage
Patent

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Cleaning process for photomasks

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Manufacturing process for semiconductor device, photomask,...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration
Reexamination Certificate

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Manufacturing process for semiconductor device, photomask,...

Semiconductor device manufacturing: process – Masking – Radiation resist
Reexamination Certificate

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Method for pattern defect correction of a photomask

Fishing – trapping – and vermin destroying
Patent

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Profile ID: LFUS-PAI-P-362134

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