4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Kuniaki Yagi

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Compound crystal and method of manufacturing same

Stock material or miscellaneous articles – Composite – Of inorganic material
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Compound crystal and method of manufacturing same

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate – Amorphous semiconductor
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Method of manufacturing compound single crystal

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Method of manufacturing compound single crystal

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth with a subsequent step acting on the...
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Method of manufacturing silicon carbide, silicon carbide,...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Forming from vapor or gaseous state
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