4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Kousuke Miyoshi

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Apparatus for dry etching

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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Method of forming metal wirings on a semiconductor substrate by

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Removal of metal contaminants from the surface of a silicon...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Gettering of semiconductor substrate
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Shallow trench isolation (STI) and method of forming the same

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Thermal processing of semiconductor devices

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
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Profile ID: LFUS-PAI-P-466558

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