Corporate Assignee
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
With means for measuring, testing, or sensing
Corporate Assignee
active
No affiliations
Air blow apparatus for a semiconductor wafer
Apparatus and a method for measuring a density of defects existi
Apparatus and a method of manufacturing a crystal
Apparatus and method for manufacturing semiconductor single crys
Apparatus and method for polishing a semiconductor wafer
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