4. Optical: systems and elements
  5. Having significant infrared or ultraviolet property
  6. Including continuously variable magnification or focal length

KLA - Tencor Corporation

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Apparatus and method for secondary electron emission microscope

Radiant energy – Inspection of solids or liquids by charged particles – Methods
Reexamination Certificate

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Optical gain approach for enhancement of overlay and...

Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate

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Sample inspection system

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Ultra-broadband UV microscope imaging system with wide range...

Optical: systems and elements – Having significant infrared or ultraviolet property – Including continuously variable magnification or focal length
Reexamination Certificate

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Ultra-broadband UV microscope imaging system with wide range...

Optical: systems and elements – Having significant infrared or ultraviolet property – Including continuously variable magnification or focal length
Reexamination Certificate

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