Optical: systems and elements – Having significant infrared or ultraviolet property – Including continuously variable magnification or focal length
Reexamination Certificate
2008-09-09
2008-09-09
Allen, Stephone B. (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Including continuously variable magnification or focal length
C359S351000, C359S355000, C359S356000, C359S357000, C359S380000
Reexamination Certificate
active
10958242
ABSTRACT:
An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.
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Chuang Yung-Ho
Shafer David R.
Tsai Bin-Ming B.
Allen Stephone B.
Fineman Lee
KLA - Tencor Corporation
Smyrski Law Group, A P.C.
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