Optics: measuring and testing – By alignment in lateral direction
Reexamination Certificate
2008-04-23
2009-10-13
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
C356S401000, C356S508000, C382S151000
Reexamination Certificate
active
07602491
ABSTRACT:
A resultant image of a grating target may be obtained by dividing an image of the target into first and second portions and optically modifying the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern. The resultant image may be analyzed to determine a shift in the grating target from a shift in the Moiré pattern. Optical alignment apparatus may include a first beam splitter, an image transformation element optically coupled to the first beam splitter, and a second beam splitter. The first beam splitter divides an image of a grating target into first and second portions. The second beam splitter combines the first portion and the second portion. The image transformation element optically modifies the first and/or second portion such that a final image formed from their combination is characterized by a Moiré pattern.
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Adel Michael
Kandel Daniel
Levinski Vladimir
Seligson Joel
Isenberg Joshua D.
JDI Patent
KLA - Tencor Corporation
Lyons Michael A
Stock, Jr. Gordon J
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