4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Field effect device
  6. Having insulated electrode

Kevin Shea

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Laminated wafer sensor system for UV dose measurement

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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Method of forming high aspect ratio structures

Semiconductor device manufacturing: process – Chemical etching – Having liquid and vapor etching steps
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Method of forming high aspect ratio structures

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Methods of forming capacitors

Semiconductor device manufacturing: process – Making passive device – Stacked capacitor
Reexamination Certificate

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Poly etch without separate oxide decap

Etching a substrate: processes – Nongaseous phase etching of substrate
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Profile ID: LFUS-PAI-P-2156676

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