4. Compositions: ceramic
  5. Ceramic compositions
  6. Refractory

Kevin J. Moeggenborg

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Chemical-mechanical polishing composition and method for...

Compositions – Etching or brightening compositions
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CMP compositions for low-k dielectric materials

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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CMP method for noble metals

Abrading – Abrading process
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CMP method utilizing amphiphilic nonionic surfactants

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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CMP systems and methods utilizing amine-containing polymers

Abrading – Abrading process – Glass or stone abrading
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Profile ID: LFUS-PAI-P-270164

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