4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Alignment marks

Kevin Huggins

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Angled elongated features for improved alignment process...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Angled elongated features for improved alignment process...

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
Reexamination Certificate

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Angled elongated features for improved alignment process...

Semiconductor device manufacturing: process – Miscellaneous
Reexamination Certificate

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Lithography using controlled polarization

Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate

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Pixelated modulation of illumination pupil image

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2401828

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