Angled elongated features for improved alignment process...

Details Angled elongated features for improved alignment process... Angled elongated features for improved alignment process...

2008-01-01

2008-01-01

Vu, Hung (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Alignment marks

Reexamination Certificate

active

10875065

ABSTRACT:
Elongated features may be incorporated at least partially in an alignment region. The alignment region may be defined by a plurality of alignment features aligned along a first axis. A long axis of the elongated features may be neither parallel nor perpendicular to the first axis. The alignment region may further include another plurality of alignment features aligned a second axis that is not parallel to the first axis. The second axis may be neither parallel to or perpendicular to the long axis.

REFERENCES:
patent: 4932064 (1990-06-01), Kasahara
patent: 6504254 (2003-01-01), Takizawa
patent: 2003/0101610 (2003-06-01), Yu et al.

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