Pixelated modulation of illumination pupil image

Details Pixelated modulation of illumination pupil image Pixelated modulation of illumination pupil image

2007-03-30

2010-06-15

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S505100, C359S894000

Reexamination Certificate

active

07737420

ABSTRACT:
The present invention describes a method of conditioning radiation upstream from a reticle including: pixelating the radiation, the pixelating involving partitioning into pixels; modulating a first set of the pixels to configure for openings; modulating a second set of the pixels to outline for specific features of the openings; modulating a third set of the pixels to correct for local non-uniformities; modulating a fourth set of the pixels to compensate for global non-uniformities; and modulating a fifth set of the pixels to establish for gray scale.

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