Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Defect and etch rate control in trench etch for dual...
In-situ plasma ash/treatment after via etch of low-k films...
Method of forming dual-damascene structure
Pre-pattern surface modification for low-k dielectrics using...
Pre-pattern surface modification of low-k dielectrics
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