4. Gas separation
  5. With nonliquid cleaning means for separating media
  6. Solid agent cleaning member movingly contacts apparatus

Kenichi Yamaga

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Apparatus for heat treating semiconductors at normal pressure an

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for processing semiconductors

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Clean air apparatus

Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent

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Clean air apparatus

Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent

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Heat processing furnace and vertical-type heat processing...

Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate

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Profile ID: LFUS-PAI-P-50773

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