Electric resistance heating devices – Heating devices – Radiant heater
Reexamination Certificate
2011-07-05
2011-07-05
Campbell, Thor S (Department: 3742)
Electric resistance heating devices
Heating devices
Radiant heater
C392S407000, C219S402000, C219S403000, C219S406000, C219S408000
Reexamination Certificate
active
07974525
ABSTRACT:
The present invention is a heat processing furnace comprising: a processing vessel for accommodating an object to be processed and performing thereto a heat process; and a cylindrical heater disposed to surround a circumference of the processing vessel, for heating the object to be processed; wherein: the heater includes a cylindrical heat insulating member, ribbed shelf sections that are axially formed in a tier-like manner on an inner circumference of the heat insulating member, and heating resistance wires of a helical pattern that are placed along the respective shelf sections; and pin members are arranged in the heat insulating member at suitable intervals therebetween, the pin members holding the heating resistance wires such that the heating resistance wires are movable in a radial direction of the heater, while preventing dropout of the heating resistance wires from the shelf sections.
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Chinese Office Action issued on May 21, 2010 for Application No. 200810088177.6 with English translation.
Chinese Office Action received in CN 200810088177.6, Mailed Nov. 9, 2010 and English translation.
Ichikawa Takashi
Kobayashi Makoto
Yamaga Kenichi
Campbell Thor S
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
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