Gas separation – With nonliquid cleaning means for separating media – Solid agent cleaning member movingly contacts apparatus
Patent
1992-07-10
1993-06-15
Hart, Charles
Gas separation
With nonliquid cleaning means for separating media
Solid agent cleaning member movingly contacts apparatus
553851, 55481, 414416, 454187, B01D 4610
Patent
active
052194647
ABSTRACT:
A clean air apparatus comprises a body in which clean air is supplied, an I/O port having an opening for carrying a carrier housing objects to be treated in/out of the body, a door which opens/closes the opening, and dust preventing device for preventing dusts from entering the body from the outside through the opening, when the door is opened.
REFERENCES:
patent: 4963069 (1990-10-01), Wurst et al.
Ishii Katsumi
Moriya Syuji
Sakata Kazunari
Tanahashi Takashi
Yamaga Kenichi
Hart Charles
Tokyo Electron Limited
Tokyo Electron Sagami Limited
LandOfFree
Clean air apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Clean air apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Clean air apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1040176