4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Kazuyuki Tomita

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Apparatus and method for surface treatment to substrate

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
Reexamination Certificate

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Board cleaning method, board cleaning apparatus, and...

Adhesive bonding and miscellaneous chemical manufacture – Surface bonding means and/or assembly means therefor – With means shaping – scarifying – or cleaning joining surface...
Reexamination Certificate

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Dry etching process utilizing a recessed electrode

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Dry-etching apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Dry-etching method

Adhesive bonding and miscellaneous chemical manufacture – Delaminating processes adapted for specified product – Delaminating in preparation for post processing recycling step
Patent

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Profile ID: LFUS-PAI-P-108161

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