Board cleaning method, board cleaning apparatus, and...

Details Board cleaning method, board cleaning apparatus, and... Board cleaning method, board cleaning apparatus, and...

2002-10-07

2009-12-22

Markoff, Alexander (Department: 1792)

Adhesive bonding and miscellaneous chemical manufacture

Surface bonding means and/or assembly means therefor

With means shaping, scarifying, or cleaning joining surface...

C156S379600, C156S379800, C156S381000, C156S497000, C156S538000, C438S115000, C438S719000, C438S906000, C134S001100, C134S001200

Reexamination Certificate

active

07635016

ABSTRACT:
In a board cleaning method for dry cleaning of connection sites on resin-based boards, one or more gases selected from a group consisting of gas that contains a hydrogen element and gas that contains a fluorine element are supplied at least to the connection sites, plasma is generated from the supplied gas, and the boards are cleaned by radicals and ions that are produced by the generated plasma.

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