4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation

Kazuyuki Mitsuoka

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Electron beam processing method and apparatus

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Electron beam processing method and apparatus

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate

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Surface processing apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate

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Thin film processing method and system

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2995908

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