Electron beam processing method and apparatus

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging

Reexamination Certificate

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Details

C430S942000, C427S551000, C427S595000, C250S492200, C250S492300

Reexamination Certificate

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10810633

ABSTRACT:
An organic material film formed on a surface of an object to be processed is cured by electron beams irradiated thereon through a hydrocarbon radical generating gas. By employing the electron beams and the hydrocarbon radical generating gas, a deterioration of a k value of the organic material film and a reduction of a chemical resistance thereof are suppressed.

REFERENCES:
patent: 6607991 (2003-08-01), Livesay et al.
patent: 2001-143983 (2001-05-01), None
patent: 2002-0063923 (2002-08-01), None
patent: WO 01/48805 (2001-07-01), None

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