Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Electron beam imaging
Reexamination Certificate
2004-03-29
2008-03-25
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Electron beam imaging
C430S942000, C427S551000, C427S595000, C250S492200, C250S492300
Reexamination Certificate
active
07348129
ABSTRACT:
An organic material film formed on a surface of an object to be processed is cured by electron beams irradiated thereon through a hydrocarbon radical generating gas. By employing the electron beams and the hydrocarbon radical generating gas, a deterioration of a k value of the organic material film and a reduction of a chemical resistance thereof are suppressed.
REFERENCES:
patent: 6607991 (2003-08-01), Livesay et al.
patent: 2001-143983 (2001-05-01), None
patent: 2002-0063923 (2002-08-01), None
patent: WO 01/48805 (2001-07-01), None
Honda Minoru
Kang Song Yun
Mitsuoka Kazuyuki
Saito Yusuke
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
Young Christopher G.
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