4. Radiant energy
  5. Supported for nonsignalling objects of irradiation

Kazuyuki Kasumi

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Exposure apparatus

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Exposure apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Exposure apparatus and device manufacturing method

Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate

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Exposure apparatus and exposing method

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Exposure apparatus, device manufacturing method, pattern...

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate

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Profile ID: LFUS-PAI-P-259404

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