Exposure apparatus and device manufacturing method

Details Exposure apparatus and device manufacturing method Exposure apparatus and device manufacturing method

2007-02-20

2007-02-20

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000

Reexamination Certificate

active

11257791

ABSTRACT:
An exposure apparatus includes a projection optical system for projecting a multigradation pattern onto an object, a spatial modulation element that includes plural, two-dimensionally arranged pixels, and forms an optical image by binary control over each pixel, and a superposing optical system for forming the multigradation pattern by superposing the optical images for each row and/or for each column.

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patent: 6285488 (2001-09-01), Sandstrom
patent: 2002/0001028 (2002-01-01), Mori et al.
patent: 2003/0179352 (2003-09-01), Van Der Mast
patent: 1 315 850 (2003-06-01), None
patent: 2002-506233 (2002-02-01), None
patent: 2003-243300 (2003-08-01), None

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