Exposure apparatus and device manufacturing method

Details Exposure apparatus and device manufacturing method Exposure apparatus and device manufacturing method

2007-06-26

2007-06-26

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S069000, C355S071000, C250S492100, C250S492200

Reexamination Certificate

active

11090519

ABSTRACT:
An exposure apparatus for scanning an exposure spot in an exposure allocated area and for exposing a desired pattern by controlling power of the exposure spot in accordance with an exposure pattern, includes an exposure unit for arranging plural fine exposure elements, for forming plural exposure spots F1to F9on an object to be exposed, and for previously defining the exposure allocated areas SA11to SA19respectively corresponding to the plural exposure spots F1to F9, an exposure allocated area adjuster for adjusting the exposure allocated areas SA12and SA15in accordance with directions and sizes of offsets (offset amount vectors V2and V5) of the exposure spots F2and F5from a reference position, and an exposure spot controller for controlling the power of the exposure spot in accordance with the exposure pattern corresponding to actual positions of the exposure spots F1to F9.

REFERENCES:
patent: 5900637 (1999-05-01), Smith
patent: 6700600 (2004-03-01), Sandstrom et al.
patent: 6777697 (2004-08-01), Yui et al.
patent: 2006/0132750 (2006-06-01), Gui et al.
patent: 2003-515255 (2003-04-01), None
patent: 01/37051 (2001-05-01), None

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