4. Image analysis
  5. Pattern recognition

Kazuya Fukuhara

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Aberration measuring method of projection optical system

Optics: measuring and testing – Lens or reflective image former testing
Reexamination Certificate

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Exposure apparatus inspection method and exposure apparatus

Optics: measuring and testing – Inspection of flaws or impurities
Reexamination Certificate

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Exposure apparatus inspection method and method for...

Optics: measuring and testing – Lens or reflective image former testing – For optical transfer function
Reexamination Certificate

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Exposure condition setting method, semiconductor device...

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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Exposure method, exposure tool and method of manufacturing a...

Photocopying – Projection printing and copying cameras – Step and repeat
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Profile ID: LFUS-PAI-P-2174895

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