4. Radiant energy
  5. Supported for nonsignalling objects of irradiation

Kazunori Iwamoto

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Conveying apparatus and method of controlling the same

Conveyors: power-driven – With means to facilitate working – treating – or inspecting... – Condition responsive control of conveyor or station apparatus
Patent

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Exposure apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent

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Exposure apparatus and device manufacturing method using the sam

Photocopying – Projection printing and copying cameras – Step and repeat
Patent

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Exposure apparatus including interferometer system

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Method of manufacture of semiconductor devices

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Profile ID: LFUS-PAI-P-259402

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