Exposure apparatus

Photocopying – Projection printing and copying cameras – With temperature or foreign particle control

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Details

355 53, G03B 2742, G03B 2752

Patent

active

061339822

ABSTRACT:
An exposure apparatus having an optical stand for supporting a projecting optical system and a reticle stage, and a base frame have a plurality of struts for supporting the optical stand via dampers. The plurality of struts of the base frame are joined at their upper ends to increase the rigidity of the base frame, thereby reducing vibration caused by acceleration and deceleration of the reticle stage.

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