Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Patent
1997-11-12
2000-10-17
Mathews, Alan A.
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
355 53, G03B 2742, G03B 2752
Patent
active
061339822
ABSTRACT:
An exposure apparatus having an optical stand for supporting a projecting optical system and a reticle stage, and a base frame have a plurality of struts for supporting the optical stand via dampers. The plurality of struts of the base frame are joined at their upper ends to increase the rigidity of the base frame, thereby reducing vibration caused by acceleration and deceleration of the reticle stage.
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Ebinuma Ryuichi
Inoue Mitsuru
Iwamoto Kazunori
Nogawa Hideki
Canon Kabushiki Kaisha
Mathews Alan A.
Nguyen Hung Henry
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