Exposure apparatus and device manufacturing method using the sam

Photocopying – Projection printing and copying cameras – Step and repeat

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355 72, 355 75, G03B 2742, G03B 2758, G03B 2762

Patent

active

059332158

ABSTRACT:
A scanning exposure apparatus wherein a portion of a pattern of an original is projected onto a substrate through a projection optical system and the original and substrate are scanningly moved relative to the projection optical system, whereby the pattern of the original is transferred onto the substrate. The apparatus includes an original stage for holding the original, a base for supporting the original stage, and a supporting device for supporting the base at three positions, through a damper device and a pillar device. The three positions define an approximately isosceles triangle, and the scan direction is parallel to a straight line that connects a point of intersection of isosceles sides of the triangle and a gravity center thereof.

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