4. Electric heating
  5. Heating devices
  6. With heating unit structure

Kazuhiro Kuchimachi

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Electrostatic chuck

Chucks or sockets – With magnetic or electrostatic means
Patent

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Thermoelectric module

Batteries: thermoelectric and photoelectric – Thermoelectric
Reexamination Certificate

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Wafer holding member

Electric heating – Heating devices – With heating unit structure
Patent

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Wafer holding member

Compositions: ceramic – Ceramic compositions – Refractory
Patent

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Profile ID: LFUS-PAI-P-700439

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