Compositions: ceramic – Ceramic compositions – Refractory
Patent
1996-02-13
1997-10-14
Group, Karl
Compositions: ceramic
Ceramic compositions
Refractory
C04B 35581
Patent
active
056772530
ABSTRACT:
Disclosure relates to the method for improving the heat absorption characteristic of a wafer holding member made of aluminum nitride during indirect heating and the method for preventing electrostatic adhesion. To establish the former method, the wafer holding member comprises an aluminum nitride based sintered body containing Er.sub.2 O.sub.3 as a sintering aid and silicon in the range of more than 200 ppm to 500 ppm or less and having a thermal conductivity of 150 W/m.k or more, and further comprises a holding base body made of an aluminum nitride based sintered body.
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patent: 5077245 (1991-12-01), Miyahara
patent: 5124284 (1992-06-01), Ishida et al.
patent: 5147832 (1992-09-01), Shimoda et al.
patent: 5219803 (1993-06-01), Yamakawa et al.
patent: 5376601 (1994-12-01), Okawa et al.
patent: 5508240 (1996-04-01), Komatsu et al.
Inoue Hironori
Kawanabe Yasunori
Kuchimachi Kazuhiro
Kukita Akihiro
Nagano Saburo
Group Karl
Kyocera Corporation
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