4. Cleaning and liquid contact with solids
  5. Apparatus
  6. With means to movably mount or movably support the work or...

Katsuhiko Miya

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Substrate position correcting method and apparatus using...

Material or article handling – Article reorienting device – Article frictionally engaged and rotated by relatively...
Reexamination Certificate

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Substrate processing apparatus

Cleaning and liquid contact with solids – Apparatus – With means to movably mount or movably support the work or...
Patent

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Substrate processing apparatus and a substrate processing...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With gas inlet structure
Reexamination Certificate

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Substrate processing apparatus and method

Cleaning and liquid contact with solids – Processes – With work or work parts movable during treatment
Reexamination Certificate

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Substrate processing apparatus and method with proximity...

Drying and gas or vapor contact with solids – Process – Gas or vapor contact with treated material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1059384

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