Material or article handling – Article reorienting device – Article frictionally engaged and rotated by relatively...
Reexamination Certificate
2005-10-28
2009-06-16
Adams, Gregory W (Department: 3652)
Material or article handling
Article reorienting device
Article frictionally engaged and rotated by relatively...
C414S936000, C414S609000, C700S059000
Reexamination Certificate
active
07547181
ABSTRACT:
A substrate W rotates about the center of rotations A0of a spin base3, while supported by plural support pins5in such a manner that the substrate W can freely slide and while held owing to the force of friction which develops between the bottom surface of the substrate W and the support pins5. After a detection sensor74detects, while the substrate W rotates, an edge surface position (eccentric position) of the edge surface of the substrate which is the farthest from the center of rotations A0, a press block71pushes this edge surface position to a preset position P1which is away along the horizontal direction from the center of rotations A0by a distance which is determined in accordance with the radius of the substrate W. This aligns the eccentric position to the preset position P1and positions the center W0of the substrate within a predetermined range from the center of rotations A0.
REFERENCES:
patent: 4655584 (1987-04-01), Tanaka et al.
patent: 4685206 (1987-08-01), Kobayashi et al.
patent: 5492566 (1996-02-01), Sumnitsch
patent: 5509771 (1996-04-01), Hiroki
patent: 5851102 (1998-12-01), Okawa et al.
patent: 6056825 (2000-05-01), Sumnitsch
patent: 6104002 (2000-08-01), Hirose et al.
patent: 6152677 (2000-11-01), Tateyama et al.
patent: 6316367 (2001-11-01), Sumnitsch
patent: 6811618 (2004-11-01), Kuroda
patent: 6824613 (2004-11-01), Dai et al.
patent: 2003/0031549 (2003-02-01), Berger et al.
patent: 2003/0098048 (2003-05-01), Kuroda
patent: 2003/0161706 (2003-08-01), Kurita et al.
patent: 2003/0196686 (2003-10-01), Chiu et al.
patent: 60-239024 (1985-11-01), None
patent: 61-134814 (1986-06-01), None
patent: 62-95844 (1987-05-01), None
patent: 5-13037 (1993-02-01), None
patent: 5-226459 (1993-09-01), None
patent: 6-13450 (1994-01-01), None
patent: 6-316777 (1994-11-01), None
patent: 7-7069 (1995-01-01), None
patent: 8-17897 (1996-01-01), None
patent: 8-335624 (1996-12-01), None
patent: 10-89904 (1998-04-01), None
patent: 11-87468 (1999-03-01), None
patent: 11-176795 (1999-07-01), None
patent: 2000-235948 (2000-08-01), None
patent: 2000-286325 (2000-10-01), None
patent: 2002-246444 (2002-08-01), None
patent: 2003-203891 (2003-07-01), None
patent: 2003-229399 (2003-08-01), None
Japanese Office Action issued Sep. 2, 2008 in corresponding Japanese Patent Application 2004-330404.
Office Action issued Dec. 24, 2008 in corresponding Japanese Patent Application No. 2004-330405.
Adachi Hideki
Fukatsu Eiji
Miya Katsuhiko
Yashiki Hiroyuki
Adams Gregory W
Dainippon Screen Mfg. Co,. Ltd.
Ostrolenk Faber Gerb & Soffen, LLP
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