4. Coating apparatus
  5. Gas or vapor deposition
  6. Multizone chamber

Katsuhiko Mihara

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Processing apparatus

Material or article handling – Apparatus for charging a load holding or supporting element... – With simultaneous charging and discharging of plural load...
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Treatment system and treatment apparatus

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
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Treatment system and treatment apparatus

Heating – Work chamber having heating means – Having means by which work is progressed or moved mechanically
Patent

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Treatment system and treatment apparatus with multi-stage carrie

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Treatment system including a plurality of treatment apparatus

Coating apparatus – Gas or vapor deposition – Multizone chamber
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Profile ID: LFUS-PAI-P-397670

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