Treatment system and treatment apparatus

Details Treatment system and treatment apparatus Treatment system and treatment apparatus

1994-09-30

1997-06-17

Argenbright, Tony M.

Heating

Work chamber having heating means

Having means by which work is progressed or moved mechanically

432 6, 432241, 432253, F27B 904

Patent

active

056392346

ABSTRACT:
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and an first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply and exhaust are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A valve device is provided for the inert gas supply and exhaust.

REFERENCES:
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 4943235 (1990-07-01), Nako et al.
patent: 5163832 (1992-11-01), Ishii et al.
patent: 5207573 (1993-05-01), Miyagi et al.
patent: 5207578 (1993-05-01), Sakata
patent: 5221201 (1993-06-01), Yamaga et al.
patent: 5226812 (1993-07-01), Sakata
patent: 5249960 (1993-10-01), Monoe
patent: 5273423 (1993-12-01), Shiraiwa
patent: 5378145 (1995-01-01), Ono et al.

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