Treatment system and treatment apparatus

Details Treatment system and treatment apparatus Treatment system and treatment apparatus

1993-07-12

1995-01-03

Yuen, Henry C.

Heating

Work chamber having heating means

Having means by which work is progressed or moved mechanically

432253, 432241, 432 6, F27B 904

Patent

active

053781457

ABSTRACT:
A treatment system is disclosed, which has a treatment apparatus for performing a predetermined treatment for a planar workpiece contained in a carrier, and an first air-tight carrier storage chamber for storing the carrier. The treatment apparatus may also have an air-tight second carrier storage chamber. An inert gas supply and an exhaust means are connected to each of the treatment apparatus, the first carrier storage chamber, and the second carrier storage chamber. A valve device is provided for the inert gas supply and exhaust means.

REFERENCES:
patent: 4938691 (1990-07-01), Ohkase et al.
patent: 4943235 (1990-07-01), Nakao et al.
patent: 5163832 (1992-11-01), Ishii et al.
patent: 5207573 (1993-05-01), Miyagi et al.
patent: 5207578 (1993-05-01), Sakata
patent: 5221201 (1993-06-01), Yamaga et al.
patent: 5226812 (1993-07-01), Sakata
patent: 5249960 (1993-10-01), Monoe
patent: 5273423 (1993-12-01), Shiraiwa

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